FEI Titan THEMIS 200 specifications
200 kV aberration corrected TEM/STEM microscope with image corrector
STEM modes: BF, DF, HAADF images
4 SDD EDS detectors built into the column
Specimen tilting in double tilt analytical holder: X direction ± 35o, Y direction ±30o.
Field emission gun
CETA 16M camera